Oxford Instruments and Taiwan Industrial Technology Research Institute

As a leader in etching, deposition and growth systems, Oxford Instruments will soon install more equipment for the Institute of Industrial Technology in the state-of-the-art cleanroom. Oxford Instruments's program engineers will use these and the selected equipment of the institute as demonstrations and provide support for the equipment performance of Far East customers. This will more effectively expand the research capabilities of Oxford Instruments, allowing Oxford Instruments to have a broader approach to more effectively serve Asian customers. Oxford Instruments has installed several facilities at the Institute of Industrial Technology, including PlasmaProSystem 100 multi-cluster system combined with PECVD chamber, RIE reactive ion etching and ALD atomic layer deposition, PlasmaProSystem 100ICP380 plasma etching tool and PlasmaProSystem 80Plus PECVD plasma enhanced deposition equipment, all of which Has been used to advance research. PlasmaProNGP1000PECVD, a PlasmaProaNGPa1000 Etch, and PlasmaProSystem 133ICP380 and accessories, these three devices have been installed in a dedicated Oxford Instruments Optoelectronics laboratory to prepare for the next phase. Dr. Shing-Yuan Tsai, Vice President of the Institute of Industrial Technology, commented: “In the field of materials chemistry and nanotechnology, the Institute of Industrial Technology collaborates with leading companies in Taiwan and around the world to develop and promote the establishment of high value-added industries and the application of nanotechnology. Traditional industries. Our cooperation with Oxford Instruments clearly shows that our research level and equipment are world-class, and the cooperation between the two agencies is mutually beneficial."

Jeffrey Seah, Sales Director for Asia, Oxford Instruments' Plasma Technology Division, acknowledged the collaboration. He said: “Oxford Instruments is a world leader in etching, deposition and growth equipment, and has established a cooperative relationship with the Institute of Industrial Technology, successfully for industrial technology. The Institute’s clean rooms have installed advanced equipment, and one of the main objectives of Oxford Instruments is to pursue responsible development and deeper understanding of the world through science and technology, and this cooperation project with such a well-known research institute is to achieve this goal. ."